When my aunt brushed her Moments
she found a red hair just like her hair
handed it over and let me take a look.Uncle on the side said with emotion that she seems to be pregnant.It reminds me of the time a few years ago when I suddenly knew that the person I had a crush on at school could call my uncle.Does it feel a bit similar?
she found a red hair just like her hair
handed it over and let me take a look.Uncle on the side said with emotion that she seems to be pregnant.It reminds me of the time a few years ago when I suddenly knew that the person I had a crush on at school could call my uncle.Does it feel a bit similar?
#任嘉伦[超话]#
[好喜欢]#任嘉伦长意#
[好喜欢]#任嘉伦与君初相识#
「Ms Karen Yam Ka lun」
Life is full of people, Lun Jia is full of people, and you are as warm as spring, bringing hope # to meet the best Ren Jialun. All the good things in the world come on schedule because of you.Looking forward to your new work.@任嘉伦Allen https://t.cn/RpOj17b
[好喜欢]#任嘉伦长意#
[好喜欢]#任嘉伦与君初相识#
「Ms Karen Yam Ka lun」
Life is full of people, Lun Jia is full of people, and you are as warm as spring, bringing hope # to meet the best Ren Jialun. All the good things in the world come on schedule because of you.Looking forward to your new work.@任嘉伦Allen https://t.cn/RpOj17b
【上科大信息学院吴涛课题组在钪掺杂氮化铝压电薄膜与谐振器领域取得重要进展】#上海科技大学[超话]#
上科大信息学院吴涛课题组致力于利用先进传感材料与微纳工艺研发微纳机电传感器件与系统(MEMS),主要包括压电声学微纳器件与IC接口电路、声光磁等多物理场调控与传感系统等。近期,课题组在高浓度钪掺杂氮化铝(AlScN)压电薄膜谐振器的研究成果发表于《电子器件快报》(IEEE Electron Device Letters, EDL),题为High Figure-of-Merit Lamb Wave Resonators based on Al0.7 Sc0.3N Thin Film。
为了进一步拓展谐振器的带宽,吴涛课题组与上海科技大学量子器件中心、EVATEC公司深度合作,开发出高压电系数的材料掺钪氮化铝(AlScN)制备方法,制造出了钪浓度为30%的高浓度掺杂的AlScN薄膜材料。课题组克服多项工艺和设计难题,利用AlScN薄膜开发出的兰姆波谐振器,优值(Figure-Of-Merit,FOM)超过86。该研究结果证明, AlScN薄膜在谐振器和滤波器中具有广阔应用前景,将来极有可能在传感器和射频通信领域发挥巨大作用。
来源:上海科技大学
上科大信息学院吴涛课题组致力于利用先进传感材料与微纳工艺研发微纳机电传感器件与系统(MEMS),主要包括压电声学微纳器件与IC接口电路、声光磁等多物理场调控与传感系统等。近期,课题组在高浓度钪掺杂氮化铝(AlScN)压电薄膜谐振器的研究成果发表于《电子器件快报》(IEEE Electron Device Letters, EDL),题为High Figure-of-Merit Lamb Wave Resonators based on Al0.7 Sc0.3N Thin Film。
为了进一步拓展谐振器的带宽,吴涛课题组与上海科技大学量子器件中心、EVATEC公司深度合作,开发出高压电系数的材料掺钪氮化铝(AlScN)制备方法,制造出了钪浓度为30%的高浓度掺杂的AlScN薄膜材料。课题组克服多项工艺和设计难题,利用AlScN薄膜开发出的兰姆波谐振器,优值(Figure-Of-Merit,FOM)超过86。该研究结果证明, AlScN薄膜在谐振器和滤波器中具有广阔应用前景,将来极有可能在传感器和射频通信领域发挥巨大作用。
来源:上海科技大学
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